Semiconductor related equipment

In the field of semiconductor-related production equipment, we manufacture and market the Load Port which transfers silicon wafers to individual processing equipment, wafer transfer robots(Atmospheric type and vacuum type), and EFEM which integrate the Load Port and wafer transfer robots. We also provide load ports, transfer robots and related integrated EFEM for FOPLP.

Equipment Front End Module / Sorter "Freedom ®"

Hirata Equipment Front End Module is located in front of the process equipment that processes wafers and panels. The Equipment Front End Module passes wafers and panels between the pods and the process equipment and the sorter transfers wafers and panels in a clean environment.

* Freedom is registered trademark of Hirata Corporation in Japan, the US, Korea, and Taiwan.

300mm Equipment Front End Module/Sorter series

FOPLP Equipment Front End Module/Sorter series

  • 4 port

  • 3 Port

  • 2 Port

Wafer transfer robot

300mm

Wafer transfer robots that can be used in low-vacuum environments and high-vacuum environments.

FOPLP

Wafer transfer robots that can be used in low-vacuum environments and high-vacuum environments.

  • AR-Wn series for FOPLP

Aligner

Aligners are wafer positioning equipment.

Prealigner

Edge grip prealigner

Load port

Load ports that support 300 mm and FOPLP wafers.

FOUP opener

SMIF opener

SMIF pod opener that support 200 mm wafers.

200 mm SMIF pod opener