Products Info
Semiconductor related equipment
In the field of semiconductor-related production equipment, we manufacture and market the Load Port which transfers silicon wafers to individual processing equipment, wafer transfer robots(Atmospheric type and vacuum type), and EFEM which integrate the Load Port and wafer transfer robots. We also provide load ports, transfer robots and related integrated EFEM for FOPLP.
Equipment Front End Module / Sorter "Freedom ®"
Hirata Equipment Front End Module is located in front of the process equipment that processes wafers and panels. The Equipment Front End Module passes wafers and panels between the pods and the process equipment and the sorter transfers wafers and panels in a clean environment.
* Freedom is registered trademark of Hirata Corporation in Japan, the US, Korea, and Taiwan.
300mm Equipment Front End Module/Sorter series
FOPLP Equipment Front End Module/Sorter series
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4 port
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3 Port
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2 Port
Wafer transfer robot
300mm
Wafer transfer robots that can be used in low-vacuum environments and high-vacuum environments.
FOPLP
Wafer transfer robots that can be used in low-vacuum environments and high-vacuum environments.
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AR-Wn series for FOPLP
Aligner
Aligners are wafer positioning equipment.
Prealigner
Edge grip prealigner
Load port
Load ports that support 300 mm and FOPLP wafers.
FOUP opener
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300 mm KWF series
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KWF series for FOPLP
SMIF opener
SMIF pod opener that support 200 mm wafers.
