Semiconductor related equipment
Equipment Front End Module / Sorter "Freedom ®"
Hirata Equipment Front End Module is located in front of the process equipment that processes wafers and panels. The Equipment Front End Module passes wafers and panels between the pods and the process equipment and the sorter transfers wafers and panels in a clean environment.
* Freedom is registered trademark of Hirata Corporation in Japan, the US, Korea, and Taiwan.
300mm Equipment Front End Module/Sorter series
FOPLP Equipment Front End Module/Sorter series
Wafer transfer robot
AR-Wn series for FOPLP
Edge grip prealigner
300 mm KWF series
KWF series for FOPLP