Products Info
Industrial robot
Robots are part of Hirata's core technology, and we produce and sell robot and control systems to many industries. Our robot are incorporated into each production device, working as part of the system to realize intelligent production.
Cartesian robots
Gantry robot series
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Gantry robot GR-3000 series
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Gantry robot GR-1750 series
Small Cartesian robots
New small, fast, and high precision general-purpose Cartesian robot.
MACHINE-BASE series
Single Axis MB-207 series
MACHINE-BASE series (Z/W Axis Assy)
SCARA-type robots
New SCARA robot with high-speed and high precision, making use of our extensive experience and knowledge in manufacturing.
AR-T series
AR-TS series
AR-F series
Articulated robots
AR-V series
3D Vision System
3D Vision System
Robot controller
We provide individual support for controller that are used with small Cartesian and SCARA robot.
Robot controller
Teach Pendant
Teach Pendant
PC Applications
Simulator
Wafer transfer robots
300mm
Wafer transfer robot that can be used in low-vacuum environments and high-vacuum environments.
FOPLP
Wafer transfer robot that can be used in low-vacuum environments and high-vacuum environments.
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AR-Wn series for FOPLP
Equipment Front End Module / Sorter "Freedom ®"
Hirata Equipment Front End Module is located in front of the process equipment that processes wafers and panel. The Equipment Front End Module passes wafers and panel between the pod and the process equipment and the sorter transfers wafers and panel in a clean environment.
* Freedom is registered trademark of Hirata Corporation in Japan, the US, Korea, and Taiwan.
300mm Equipment Front End Module/Sorter series
FOPLP Equipment Front End Module/Sorter series
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4 Port
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3 Port
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2 Port
Aligner
Aligner are wafer positioning equipment.
Prealigner
Edge grip prealigner
Load port
Load port that support 300 mm and FOPLP wafers.
FOUP opener
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300 mm KWF series
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KWF series for FOPLP
SMIF opener
SMIF pod opener that support 200 mm wafers.
200 mm SMIF pod opener
Substrate transfer robots
7th to 10th generation substrate transfer robots
Hirata substrate transfer robots safely transfer large sized substrates at high speed.
5th to 6th generation substrate transfer robots
Hirata substrate transfer robots safely transfer medium sized substrates at high speed.
Others
Introducing Hirata's other systems.