Industrial robot

Robots are part of Hirata's core technology, and we produce and sell robot and control systems to many industries. Our robot are incorporated into each production device, working as part of the system to realize intelligent production.

Cartesian robots

Gantry robot series

Small Cartesian robots

New small, fast, and high precision general-purpose Cartesian robot.

MACHINE-BASE series

Single Axis MB-207 series

MACHINE-BASE series (Z/W Axis Assy)

SCARA-type robots

New SCARA robot with high-speed and high precision, making use of our extensive experience and knowledge in manufacturing.

AR-T series

AR-TS series

AR-F series

Articulated robots

AR-V series

3D Vision System

3D Vision System

Robot controller

We provide individual support for controller that are used with small Cartesian and SCARA robot.

Robot controller

Teach Pendant

Teach Pendant

PC Applications

Simulator

Wafer transfer robots

300mm

Wafer transfer robot that can be used in low-vacuum environments and high-vacuum environments.

FOPLP

Wafer transfer robot that can be used in low-vacuum environments and high-vacuum environments.

  • AR-Wn series for FOPLP

Equipment Front End Module / Sorter "Freedom ®"

Hirata Equipment Front End Module is located in front of the process equipment that processes wafers and panel. The Equipment Front End Module passes wafers and panel between the pod and the process equipment and the sorter transfers wafers and panel in a clean environment.

* Freedom is registered trademark of Hirata Corporation in Japan, the US, Korea, and Taiwan.

300mm Equipment Front End Module/Sorter series

FOPLP Equipment Front End Module/Sorter series

  • 4 Port

  • 3 Port

  • 2 Port

Aligner

Aligner are wafer positioning equipment.

Prealigner

Edge grip prealigner

Load port

Load port that support 300 mm and FOPLP wafers.

FOUP opener

SMIF opener

SMIF pod opener that support 200 mm wafers.

200 mm SMIF pod opener

Substrate transfer robots

7th to 10th generation substrate transfer robots

Hirata substrate transfer robots safely transfer large sized substrates at high speed.

5th to 6th generation substrate transfer robots

Hirata substrate transfer robots safely transfer medium sized substrates at high speed.

Others

Introducing Hirata's other systems.

Other systems, etc.

PC Applications