Industrial robot

Robots are part of Hirata's core technology, and we produce and sell robot and control systems to many industries. Our robot are incorporated into each production device, working as part of the system to realize intelligent production.

Small Cartesian robots

New small, fast, and high precision general-purpose Cartesian robot.

MACHINE-BASE series

Cartesian robots

Gantry robot series

SCARA-type robots

New SCARA robot with high-speed and high precision, making use of our extensive experience and knowledge in manufacturing.

ARM-BASE series

Robot controller

We provide individual support for controller that are used with small Cartesian and SCARA robot.

Robot controller

Substrate transfer robots

5th to 6th generation substrate transfer robots

Hirata substrate transfer robots safely transfer medium sized substrates at high speed.

7th to 10th generation substrate transfer robots

Hirata substrate transfer robots safely transfer large sized substrates at high speed.

Wafer transfer robots

450mm Wafer transfer robots

Wafer transfer robot that can be used in low-vacuum environments and high-vacuum environments.

300mm Wafer transfer robots

Wafer transfer robot that can be used in low-vacuum environments and high-vacuum environments.

Equipment Front End Module / Sorter

Hirata Equipment Front End Module is located in front of the process equipment that processes wafers. The Equipment Front End Module passes wafers between the FOUP (pod) and the process equipment and the sorter transfers wafers in a clean environment.

450mm Equipment Front End Module/Sorter series

300mm Equipment Front End Module/Sorter series

Aligner

Aligner are wafer positioning equipment.

Prealigner

Edge grip prealigner

Load port

Load port that support 450 mm and 300 mm wafers.

FOUP opener

SMIF opener

SMIF pod opener that support 200 mm wafers.

200 mm SMIF pod opener

Others

Introducing Hirata's other systems.

Other systems, etc.