Products Info
Semiconductor related equipment
SMIF opener
200 mm SMIF pod opener
KWY series (manual)
Supports opening and closing pods by the operator
[Features]
Manual opening/closing type |
Supports opening and closing pods by the operator |
|---|---|
High level of cleanliness performance |
Reduces particles by separating the machinery section and with forced exhaust |
Prevents the inclusion of particles by controlling air flow |
Prevents turbulence and the inclusion of particles by controlling the opening and closing operation of the pod |
Supports reticule pods |
Capable of opening and closing RSP-200 standard pods (optional) |