Products Info
Semiconductor related equipment
Wafer transfer robot
300mm
Vacuum type robot AR-Wn Series
Robot for 300mm & 450mm wafer handling
High vacuum, High precision, High-speed motion, High reliability, Abundant variations
[Features]
Accommodating device miniaturization |
Adopting Direct Drive motors to suppress vibration less than 0.1G. Adopting steel belt to suppress lateral vibration and drift. |
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High throughput |
High throughput achieved by rigid, precise and fast robot. Smart Motion to shorten transfer time. |
High reliability |
No possibility of scatter for magnetic fluid. Collision detection to minimize damage to arm and time to restore. |
Easy maintenance |
Special absolute encoder adopted to eliminate data backup battery and achieve easy maintenance. |