Products Info
Semiconductor related equipment
SMIF opener
200 mm SMIF pod opener
KWO series (with arm)
Equipped with an arm featuring a tilt mechanism
Arm stored
[Features]
Cassette transfer arm type |
Equipped with an arm featuring a tilt mechanism to transfer cassettes to process equipment |
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High level of cleanliness performance |
Reduces particles by separating the machinery section and with forced exhaust |
Prevents the inclusion of particles by controlling air flow |
Prevents turbulence and the inclusion of particles by controlling the opening and closing operation |