Products Info
Semiconductor related equipment
Equipment Front End Module / Sorter "Freedom ®"
300mm Equipment Front End Module/Sorter series
4 Port
Extensive record, supports process node scaling and N2 purging with high throughput
[Features]
Supports process node scaling and advanced integration |
Supports process node scaling with super clean technology N2 purge function makes it possible to replace the atmosphere in a short time |
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Abundant variations, customizable |
We can respond to your requirements thanks to an expandable base design |
Reliability built on our record |
Inherits our robot technologies backed by our delivery record of over 40,000 units 5 years maintenance free |
Throughput |
Achieves a high throughput of 500 wafers an hour with our proprietary motion technologies |
Reduces the environmental burden |
Battery free servo motors |