Semiconductor related equipment

Wafer transfer robot


Atmospheric type robot AR-Wn180CL-5-TR-940

Supports multi-stage equipment

Z-axis retracted


Abundant variations

Single arm, single arm with flip-axis, twin arm, twin arm with single-arm flip-axis, others

Supports a long stroke elevating axis

Additional 940 mm long stroke variation with the telescopic elevating axis

Battery free

Eliminates the encoder backup battery by employing a new encoder

Throughput improvements

Achieves smooth, continuous movements by improvements in the movement control function uniquely developed by Hirata

Vibration suppression control

Achieves the suppression of mechanical vibrations by employing vibration suppression control uniquely developed by Hirata