Products Info

Industrial robot

Substrate transfer robots

High rigidity twin mast type glass substrate transfer robot

Supports substrate sizes up a maximum 1100 x 1300 mm.


Flexible layout	A single robot covers multiple pieces of equipment A dual-stage independent fork unit optimizes positioning with equipment
High functionality and low cost design	Alignment is possible on the hand while running, decreases cycle time
Space savings	The controller is incorporated into the robot housing to realize large space savings