Products Info
Industrial robot
Substrate transfer robots
7th to 10th generation substrate transfer robots
7th-8.5th generation glass substrate transfer robot (CR-R0820CL)
High rigidity twin mast type high functionality robot
Supports substrate sizes up a maximum 2200 x 2500 mm.
[Features]
| Flexible layout |
A single robot covers multiple pieces of equipment Reduces the rotational diameter by the adoption of a linked arm system |
|---|---|
| Supports a long stroke high rigidity Z-axis |
Achieves high rigidity and high precision with the twin mast system Supports a Z-axis stroke up to 5000 mm max |
| Reduces the environmental burden |
Reduces power consumption with power supply regenerative unit |