Industrial robot

Substrate transfer robots

7th to 10th generation substrate transfer robots

7th-8.5th generation glass substrate transfer robot (CR-R0820CL)

High rigidity twin mast type high functionality robot


Supports substrate sizes up a maximum 2200 x 2500 mm.


[Features]

Flexible layout

A single robot covers multiple pieces of equipment

Reduces the rotational diameter by the adoption of a linked arm system

Supports a long stroke high rigidity Z-axis

Achieves high rigidity and high precision with the twin mast system

Supports a Z-axis stroke up to 5000 mm max

Reduces the environmental burden

Reduces power consumption with power supply regenerative unit

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