Industrial robot

Substrate transfer robots

5th to 6th generation substrate transfer robots

5th generation glass substrate transfer robot (CR-J120 series)

Telescopic type high functionality, low cost robot

Supports substrate sizes up a maximum 1100 x 1300 mm. The Z-axis is telescopic and equipped with two stages, three stages, and four stages as standard. Capable of supporting a maximum stroke of 1600 mm.


Flexible layout

A single robot covers multiple pieces of equipment

A dual-stage independent fork unit optimizes positioning with equipment

High functionality and low cost design

Alignment is possible on the hand while running, decreases cycle time

Space savings

The controller is incorporated into the robot housing to realize large space savings