Products Info
Industrial robot
Substrate transfer robots
5th to 6th generation substrate transfer robots
5th generation glass substrate transfer robot (CR-J120 series)
Telescopic type high functionality, low cost robot
Supports substrate sizes up a maximum 1100 x 1300 mm. The Z-axis is telescopic and equipped with two stages, three stages, and four stages as standard. Capable of supporting a maximum stroke of 1600 mm.
[Features]
Flexible layout |
A single robot covers multiple pieces of equipment A dual-stage independent fork unit optimizes positioning with equipment |
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High functionality and low cost design |
Alignment is possible on the hand while running, decreases cycle time |
Space savings |
The controller is incorporated into the robot housing to realize large space savings |