Panel manufacturing systems

Coater systems

Coater systems

Pressure difference drier HVD series

High speed drying without photo-resist irregularities

In the coater system, the dryer dries glass substrates after they are coated with photo-resist at high speed and without irregularities.


Supports 3rd to 8.5th generation glass substrates

We feature a lineup of products that can support each generation of glass substrates

Vacuum attainment time

Vacuum attainment pressure/time: 13 pa/15 sec

Reduces drying time

Halves the hot plate process time

Prevents irregularities through low temperature drying

Reduces burn irregularities to a minimum with reduced pressure drying