Products Info
Panel manufacturing systems
Coater systems
Coater systems
Pressure difference drier HVD series
High speed drying without photo-resist irregularities
In the coater system, the dryer dries glass substrates after they are coated with photo-resist at high speed and without irregularities.
[Features]
Supports 3rd to 8.5th generation glass substrates |
We feature a lineup of products that can support each generation of glass substrates |
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Vacuum attainment time |
Vacuum attainment pressure/time: 13 pa/15 sec |
Reduces drying time |
Halves the hot plate process time |
Prevents irregularities through low temperature drying |
Reduces burn irregularities to a minimum with reduced pressure drying |