Products Info
Industrial robot
Load port
FOUP opener
300 mm KWF series
Extensive record, supports process node scaling, N2 purging, and 200 mm cassettes
[Features]
Accommodating device miniaturization |
Unique airflow analysis to prevent particles. N2 purge on load port. |
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Accommodating various carriers |
Accommodating FOUP, MAC and AUTO-FOSB. |
High reliability |
High reliability achieved by accumulated technology of 300mm load port. (MCBF:1,000,000cycle) Detect double or crossed wafers by high precision mapping. Latch over-rotation to close carriers completely. |
Easy Maintenance |
No batteries are used, and maintenance is much easier. |