Products Info
Industrial robot
Aligner
Prealigner
200/150 mm prealigner
Non-contact sensor system, suppresses particles
[Features]
High level of cleanliness performance |
Suppresses the generation of particles by minimizing the contact area |
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High speed alignment |
Non-contact (sensor system), supports orientation flat type and notch type wafers Achieves advanced alignment by high speed processing with an alignment time 2 seconds or lower and a correction accuracy of ±0.2°. |