Products Info
Industrial robot
SMIF opener
200 mm SMIF pod opener
KWP series (auto open/close)
Automatic opening and closing by host device type
[Features]
Automatic opening and closing by host device type |
Achieves a mini environment by docking with the host device |
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High level of cleanliness performance |
Reduces particles by separating the machinery section and with forced exhaust |
Prevents the inclusion of particles by controlling air flow |
Prevents turbulence and the inclusion of particles by controlling the opening and closing operation of the pod |
Small footprint |
Easily connected to and incorporated with dedicated equipment by the achievement of the small footprint |
Supports reticule pods |
Capable of opening and closing RSP-200 standard pods (optional) |