Industrial robot

Wafer transfer robots


Vacuum type robot AR-Wn Series

Robot for 300mm & 450mm wafer handling

High vacuum, High precision, High-speed motion, High reliability, Abundant variations


Accommodating device miniaturization

Adopting Direct Drive motors to suppress vibration less than 0.1G.

Adopting steel belt to suppress lateral vibration and drift.

High throughput

High throughput achieved by rigid, precise and fast robot.

Smart Motion to shorten transfer time.

High reliability

No possibility of scatter for magnetic fluid.

Collision detection to minimize damage to arm and time to restore.

Easy maintenance

Special absolute encoder adopted to eliminate data backup battery and achieve easy maintenance.