Industrial robot

Load port

FOUP opener

450 mm KWF series

ISMI evaluated, carries on the functionality cultivated at 300 mm


Accommodating device miniaturization

Unique airflow analysis to prevent particles.

N2 purge on load port.

Accommodating various carriers

Accommodating FOUP, MAC and AUTO-FOSB.

High reliability

High reliability achieved by accumulated technology of 300mm load port.(MCBF:1,000,000cycle)

Detect double or crossed wafers by high precision mapping.

Latch over-rotation to close carriers completely.

Easy maintenance

No batteries are used, and maintenance is much easier.