Industrial robot

Load port

FOUP opener

450 mm KWF series

ISMI evaluated, carries on the functionality cultivated at 300 mm



[Features]

Accommodating device miniaturization

Unique airflow analysis to prevent particles.

N2 purge on load port.

Accommodating various carriers

Accommodating FOUP, MAC and AUTO-FOSB.

High reliability

High reliability achieved by accumulated technology of 300mm load port.(MCBF:1,000,000cycle)

Detect double or crossed wafers by high precision mapping.

Latch over-rotation to close carriers completely.

Easy maintenance

No batteries are used, and maintenance is much easier.