Industrial robot

SMIF opener

200 mm SMIF pod opener

KWO series (with arm)

Equipped with an arm featuring a tilt mechanism



Arm stored

[Features]

Cassette transfer arm type

Equipped with an arm featuring a tilt mechanism to transfer cassettes to process equipment

High level of cleanliness performance

Reduces particles by separating the machinery section and with forced exhaust

Prevents the inclusion of particles by controlling air flow

Prevents turbulence and the inclusion of particles by controlling the opening and closing operation