Products Info
Industrial robot
Aligner
Edge grip prealigner
300 mm edge grip prealigner
Employs an edge grip mechanism
[Features]
High level of cleanliness performance |
Employs an edge grip mechanism that reduces particle contamination by not touching the bottom of the wafer |
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High speed, high accuracy |
High speed and high accuracy through the use of high resolution absolute AC servo motors |
High performance |
Supports retention check via wafer grip sensor, ESD measures with the use of electrically-conductive materials and conductive material treatments |