Industrial robot

Aligner

Prealigner

450 mm prealigner

Non-contact sensor system, suppresses particles



[Features]

High level of cleanliness performance

Suppresses the generation of particles by minimizing the contact area

High speed alignment

Non-contact (sensor system), supports orientation flat type and notch type wafers

Achieves advanced alignment by high speed processing with an alignment time 2 seconds or lower and a correction accuracy of ±0.2°.