04 Industrial robot

Robots are part of Hirata's core technology, and we produce and sell robot and control systems to many industries. Our robot are incorporated into each production device, working as part of the system to realize intelligent production.

Related products: Intelligent power modules

Small Cartesian robot

New small, fast, and high precision general-purpose Cartesian robot.

MACHINE-BASE series

Cartesian robot

Gantry robot series

Gantry GR-3000 series

Gantry robot GR-1750 series

Small SCARA robot

New SCARA robot with high-speed and high precision, making use of our extensive experience and knowledge in manufacturing.

ARM-BASE series

Ssubstrate transfer robot series

Hirata substrate transfer robots safely transfer medium sized substrates at high speed.

5th to 6th generation substrate transfer robots

Hirata substrate transfer robots safely transfer large sized substrates at high speed.

7th to 10th generation substrate transfer robots

Wafer transfer robot

Wafer transfer robot that can be used in low-vacuum environments and high-vacuum environments.

450mm

Wafer transfer robot that can be used in low-vacuum environments and high-vacuum environments.

300mm

Equipment Front End Module / Sorter

Hirata Equipment Front End Module is located in front of the process equipment that processes wafers. The Equipment Front End Module passes wafers between the FOUP (pod) and the process equipment and the sorter transfers wafers in a clean environment.

450 mm Equipment Front End Module/Sorter series

300 mm Equipment Front End Module/Sorter series

Aligner

Aligner are wafer positioning equipment.

Prealigner

Edge grip prealigner

Load port

Load port that support 450 mm and 300 mm wafers.

FOUP opener

SMIF opener

SMIF pod opener that support 200 mm wafers.

200 mm SMIF pod opener

Others

Introducing Hirata's other systems.

Other systems, etc.

Products Info

  • Products Info
  • Automotive related production equipment
  • Semiconductor related equipment
  • Panel manufacturing systems
  • Industrial robot
  • Electronics & Electrical appliance production equipment
  • Intelligent power module
  • Material handling equipment & Other industries
  • Medical / Chemistry & Physics device
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