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Stack Heater HSH series

Space saving and exceptionally clean Stack Heater


Hirata stack heaters achieve a high precision temperature distribution while ensuring space savings and a high level of cleanliness.


Internal structure


Supports 3rd to 8.5th generation glass substrates

We feature a lineup of products that can support each generation of glass substrates

Space savings

Halves the installation area compared to hot plate method heaters

High level of cleanliness

Improved cleanliness with no moving parts, reduces the adherence of sublimates with a central trap

Reduces pin irregularities

Reduces pin irregularities by heating both sides of the substrate

Temperature precision

Temperature setting: 50 to 200°C


Temperature precision range: 4°C

Achieves high precision temperature distribution with air flow control

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