Panel manufacturing systems

Coater Systems

Coater systems

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Pressure difference drier HVD series

High speed drying without photo-resist irregularities

 

In the coater system, the dryer dries glass substrates after they are coated with photo-resist at high speed and without irregularities.

 

[Features]

Supports 3rd to 8.5th generation glass substrates

We feature a lineup of products that can support each generation of glass substrates

Vacuum attainment time

Vacuum attainment pressure/time: 13 pa/15 sec

Reduces drying time

Halves the hot plate process time

Prevents irregularities through low temperature drying

Reduces burn irregularities to a minimum with reduced pressure drying

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