Industrial Robots

Load ports

FOUP opener

  • Contact us

This product is used for these fields.

  • Semicon

450 mm KWF series

ISMI evaluated, carries on the functionality cultivated at 300 mm

 

[Features]

Accommodating device miniaturization

Unique airflow analysis to prevent particles.

N2 purge on load port.

Accommodating various carriers

Accommodating FOUP, MAC and AUTO-FOSB.

High reliability

High reliability achieved by accumulated technology of 300mm load port.(MCBF:1,000,000cycle)

Detect double or crossed wafers by high precision mapping.

Latch over-rotation to close carriers completely.

Easy maintenance

No batteries are used, and maintenance is much easier.

  • Contact us
  • Semicon
  • List
  • Next

Products Info

  • Products Info
  • Automotive related production equipment
  • Semiconductor related equipment
  • Panel manufacturing systems
  • Industrial Robots
  • Electronics & Electrical Appliance production equipment
  • Intelligent Power Module
  • Transfer machine & other industries
  • Medical / Chemistry & Physics Device
  • FA Unit Sales
  • Manufacturing Library Movie
  • Manufacturing Library Pamphlet