Industrial Robots

EFEMs (equipment front end module)/sorters

300mm Equipment Front End Module/Sorter series

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4 Port

Extensive record, supports process node scaling and N2 purging with high throughput



Supports process node scaling and advanced integration

Supports process node scaling with super clean technology

N2 purge function makes it possible to replace the atmosphere in a short time

Abundant variations, customizable

We can respond to your requirements thanks to an expandable base design

Reliability built on our record

Inherits our robot technologies backed by our delivery record of over 40,000 units

5 years maintenance free


Achieves a high throughput of 500 wafers an hour with our proprietary motion technologies

Reduces the environmental burden

Reduces the environmental burden

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