Industrial Robots

EFEMs (equipment front end module)/sorters

450mm Equipment Front End Module/Sorter series

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This product is used for these fields.

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3 Port

ISMI evaluated, supports process node scaling and N2 purging



Supports process node scaling and advanced integration

Supports process node scaling with super clean technology

N2 purge function makes it possible to replace the atmosphere in a short time

Abundant variations, customizable

We can respond to your requirements thanks to an expandable base design


Stable, high speed transfers are possible with our proprietary motion technologies

Small footprint

Achieves a small footprint by optimizing the robot and load ports

Upstream communications

Supported depending on installation fab

Evaluated by the ISMI

Evaluated by the ISMI since 2009

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