Semiconductor related equipment

SMIF openers

200mm SMIF pod opener

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KWP series (auto open/close)

Automatic opening and closing by host device type

 

[Features]

Automatic opening and closing by host device type

Achieves a mini environment by docking with the host device

High level of cleanliness performance

Reduces particles by separating the machinery section and with forced exhaust

Prevents the inclusion of particles by controlling air flow

Prevents turbulence and the inclusion of particles by controlling the opening and closing operation of the pod

Small footprint

Easily connected to and incorporated with dedicated equipment by the achievement of the small footprint

Supports reticule pods

Capable of opening and closing RSP-200 standard pods (optional)

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