Semiconductor related equipment

Aligners

Prealigner

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450 mm prealigner

Non-contact sensor system, suppresses particles

 

[Features]

High level of cleanliness performance

Suppresses the generation of particles by minimizing the area

High speed alignment

Non-contact (sensor system), supports orientation flat type and notch type wafers

Achieves advanced alignment by high speed processing with an alignment time 2 seconds or lower and a correction accuracy of ±0.2°.

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