Semiconductor related equipment

Wafer transfer robots

300mm

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Vacuum type robot AR-Wn Series

High cleanliness, high vacuum

 

[Features]

High level of cleanliness performance

Suppresses the generation of particles with ferrofluidic seals and mesh filters

High vacuum

Achieves a low leak rate by employing a high performance ferrofluidic unit

Abundant variations

Freely combine arm length and arm type, select between high vacuum and low vacuum

No need to return to the origin

All axes use ABS encoder spec AC servo motors, making it unnecessary for them to return to the origin

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