Glass Substrate Transfer Robot (CR-J120TCL)
Features
- Flexible layout
- Covers several process equipment devices with a single loader through the addition of rack type traveling axis
- High rigidity telescopic type Z-axis stroke: 750 mm, SEMI certified cassette path line maintained at 1000 mm
- Dual-stage independent fork unit optimum device positioning with respect to device
- Highly functional design at low cost
- Allows alignment on forks. Aligns while traveling to allow shorter cycle time.
- All axes are AC servo driven. Homing is not necessary with absolute encoder
- Fully manufactured internally for shorter delivery time.
- Common controller throughout models
- Mounts controller on the robot body to reduce space requirement greatly.
- Improved reliability by simplifying wiring
Specification
- Maximum possible Substrate : 1100 x 1300mm
- High speed substrate load/unload cycle : 8 sec
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