Positioning Device
Prealigner
KWA Series
Features
- Minimizing contact area makes possible to reduce particle generation.
- Non-contact or sensor-based approach enables orientation of both flat and notch types.
- The realization of high-speed processing alignment by less than 2 seconds alignment time and ±0.2° accuracy.
specification
| Item | Prealigner |
|---|---|
| Detection Method | Laser line sensor |
| Wafer Size | 6,8,12inch |
| Accuracy (Alignment) | ±0.2mm |
| Accuracy (Centering) | ±0.2° |
| Alignment Time | Less than 2sec |
| Clean Class | Class1(0.1μm/cf) |
