Industrial Robots

SMIF Pod Opener(Automated operation)

KWP Series

Features
  • The realization of mini-environment by attaching upper equipment.
  • Reduction particles by separated location and forced exhaust.
  • Opening and closing motion control for suitable air flow.
  • Small footprint allows for easy connection and mounting for dedicated system.
  • Handing opening and closing for RSP-200 standard pod.(Option)
specification
DescriptionSMIF Pod Opener(Automated operation)
TypeKWP-08B
Dimensions370W×392D×550(680)H
Weight25.5kgf
SMIF Pod Open/Close StrokeMax.268mm
SMIF Pod Open/Close MechanismBall screw/AC servo motor
Latch Open/Close MechanismGear/DC geared motor
SMIF Pod Clamp/Unclamp MechanismPlanetary gear/DC geared motor
Wafer Mapping SensorTransmission laser sensor
Wafer Protrusion SensorTransmission laser sensor
Pods Present SensorTransmission photo sensor
Pods Present SensorTransmission laser sensor
Cycle time7sec
Power SupplyDC24V

 

 

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