SMIF Pod Opener (Manual operation)
KWY Series
Features
- The operator supports SMIF opening and closing.
- Reduction particles by separated location and forced exhaust.
- Opening and closing motion control for suitable air flow.
- Handing opening and closing for RSP-200 standard pod.(Option)
Specification
| Item | SMIF Pod Opener(Manual operation) | |
|---|---|---|
| Desktop type | Stand alone type | |
| Type | KWY-08 | KWY-08-i |
| Dimensions | 355W×452D×705H | 350W×418D× 927（1227）H |
| Weight | 30kgf | 35kgf |
| SMIF Pod Open/Close Stroke | Max.410mm | |
| SMIF Pod Open/Close Mechanism | Ball screw/AC servo motor | |
| Latch Open/Close Mechanism | Gear/DC geared motor | |
| SMIF Pod Clamp/Unclamp Mechanism | Planetary gear/DC geared motor | |
| Wafer Mapping Sensor | - | |
| Wafer Protrusion Sensor | Option | |
| Hands Safety Sensor | Option | |
| SMIF Pod Present Sensor | Available | |
| Cycle time | Open motion 12sec Close motion 14sec | |
| Power Supply | 1phase AC100V | |
