SMIF Pod Opener with arm
KWO Series
Features
- Loading arm with tilt feature in order to transport cassette to process devices.
- Reduction particles by separated location and forced exhaust.
- Opening and closing motion control for suitable air flow.
Specification
| Item | SMIF Pod Opener with arm |
|---|---|
| Type | KWO-T08 |
| Dimensions | 347W×473D×170H |
| Weight | 94kgf |
| SMIF Pod Open/Close Stroke | 275mm |
| SMIF Pod Open/Close Mechanism | Ball screw/AC servo motor |
| Latch Open/Close Mechanism | Gear/DC geared motor |
| SMIF Pod Clamp/Unclamp Mechanism | Planetary gear/DC geared motor |
| Wafer Mapping Sensor | - |
| Wafer Protrusion Sensor | Option |
| Hands Safety Sensor | - |
| SMIF Pod Present Sensor | Available |
| Cycle time | 46sec |
| Power Supply | 1phase AC200V |
