FOUP Opener
KWF Series
Features
- The enhancement of cleanliness by airflow analysis and structural design, and improve reliability.
- Eliminating the need for battery change by special ABS encoder.
- New adjust plate realizes better installation repeatability and MTTR.
- Possible to adjust FOUP, FOSB, AUTO FOSB from all carrier makers based on SEMI.
- Meeting various needs from device makers and flexible layout design.
Specification
| Item | FOUP Opener | ||||||||
|---|---|---|---|---|---|---|---|---|---|
| Type | KWF-12E | ||||||||
| Application | 300mm FOUP(conforming to SEMI standard) | ||||||||
| Dimensions | 1386H×470W×571.2D(mm) | ||||||||
| Weight | 59kgf | ||||||||
| Cycle Time | Open 7.0sec/Close7.5sec/Mapping 10.5sec | ||||||||
| Power Supply | DC24V±5％ | ||||||||
| Consumption Current | 2.5A | ||||||||
| CDA | 0.4～0.5Mpa(Less than 1.0ℓ/min) Diameter φ6 | ||||||||
| Vacuum | -40～-80kpa(Less than 1.0ℓ/min) Diameter φ6 | ||||||||
| Detection | FOUP Detection | FOUP presence/placement detection | Through-beam sensor | ||||||
| Wafer Protrusion | Wafer protrusion detection | Through-beam sensor | |||||||
| Hand- pinch | Docking interference detection | Through-beam sensor | |||||||
| FOUP Door Detection | FOUP Door Status Detection | Through-beam sensor | |||||||
| Mapping | Wafer detection | ||||||||
| Door Elevator | Mapping Elevator | Dock Slide | Clamp |
Latch open/ close | Door shunt | Mapping | |||
| Mechanism | Actuator | Rodless Cylinder | AC servo motor | Air Cylinder |
DC motor |
DC motor | DC motor | DC motor | |
| Wattage | - | 30W | - | 3.5W | 2.6W | 3.6W | 0.9W | ||
| Reduction mechanism | - | Ball screw | - | Gear | Gear | Gear | Gear | ||
| Stroke | 390mm | 390mm | 70mm | 64° | 90° | 50mm | 4° | ||
