Industrial Robots / Wafer Transfer Robot / Vacuum Type Robot (AR-WV Series)

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Airtight ferromagnetic fluid seals and mesh filter realize total particle-free condition.
High performance ferromagnetic fluid unit provides the lowest leakage rate.
Flexible combination of arm length and arm type, and also selectable high vacuum or low vacuum.
Equipped AC servomotor with absolute encoder saves returning to origin.

Robot Type		Vacuum Type Robot
Type		AR-W 170VHCL -4- T-40	AR-W 250VHCL -3- S-20	AR-W 170VLCL -4- T-40	AR-W 170VLCL -3- S-40	AR-W 150VLCL -3- S-350	AR-W 170VLCL -3- S-350
Arm Type		High vacuum twin arm	High vacuum single arm	Low vacuum twin arm	Low vacuum single arm	Low vacuum single arm with long stroke	Low vacuum single arm with long stroke
Operational Area	R1-axis	608mm	730mm	608mm	500mm	440mm	500mm
	R2-axis	608mm	-	608mm	-	-	-
	θ-axis	330°	330°	330°	330°	330°	330°
	Z-axis	40mm	20mm	40mm	40mm	350mm	350mm
Axis Speed	R1-axis	1000mm /sec	800mm /sec	1000mm /sec	1000mm /sec	900mm /sec	1000mm /sec
	R2-axis	1000mm /sec	-	1000mm /sec	-	-	-
	θ-axis	216°/sec	200°/sec	216°/sec	216°/sec	216°/sec	216°/sec
	Z-axis	100mm /sec	20mm /sec	100mm /sec	100mm /sec	250mm /sec	250mm /sec
Min. Pass-line		229mm	113mm	213mm	80mm	80mm	80mm
Min. Swinging Envelope		345mm	290mm	345mm	210mm	190mm	210mm
Repeatability	R1-axis	±0.05mm	±0.05mm	±0.05mm	±0.05mm	±0.05mm	±0.05mm
	R2-axis	±0.05mm	±0.05mm	±0.05mm	±0.05mm	±0.05mm	±0.05mm
	θ-axis	±0.03°	±0.03°	±0.03°	±0.03°	±0.03°	±0.03°
	Z-axis	±0.05mm	±0.05mm	±0.05mm	±0.05mm	±0.05mm	±0.05mm
Clean Class		Class1(0.1μ)		Class2(0.1μ)
Applicable Wafer Size		2～12inch
Payload		800g
Weight		55kg	35kg	47kg	40kg	58kg	60kg
Foot Print		φ360mm	φ235mm	φ360mm	φ360mm	φ460mm	φ460mm
Power Supply		1phase 200VAC 3.6A	1phase 200VAC 2.1A	1phase 200VAC 3.1A	1phase 200VAC 2.5A	1phase 200VAC 2.9A	1phase 200VAC 2.9A
Vacuum Resistant		10^-6Pa	10^-6Pa	10^-1Pa	10^-1Pa	10^-1Pa	10^-1Pa