Wafer Transfer Robot
Atmospheric Type Robot AR-Wn180CL-5-TR-940
Features
- Airtight ferromagnetic fluid seals realize total particle-free condition.
- The length of Z stroke enlarges till 940mm using the telescoping Z-axis.
- Accepting semiconductor manufacturing equipment of a multistage chamber type and improving the usability of the clean room.
- The industry’s first, due to the use of the special ABS encoder need no change the battery.
- Processing speed is 8 times up.(conventional ratio at Hirata)
