Wafer Transfer Robot
Atmospheric Type Robot AR-Wn180CL-5-TR-940
Features
- Airtight ferromagnetic fluid seals realize total particle-free condition.
- The length of Z stroke enlarges till 940mm using the telescoping Z-axis.
- Accepting semiconductor manufacturing equipment of a multistage chamber type and improving the usability of the clean room.
- The industry’s first, due to the use of the special ABS encoder need no change the battery.
- Processing speed is 8 times up.(conventional ratio at Hirata)
Specification
| Item | Atmospheric Type Robot | |
|---|---|---|
| Type | AR-Wn180CL-5-TR-940 | |
| Arm Type | Twin Arm | |
| Operational Area | Z-axis | 940mm |
| W-axis | 340° | |
| Arm(Lower) | 564mm | |
| Arm(Upper) | 584mm | |
| Flip-axis | 190° | |
| Axis Speed | Z-axis | 600mm/sec |
| W-axis | 360°/sec | |
| Arm(Lower) | 1300mm/sec | |
| Arm(Upper) | 1300mm/sec | |
| Flip-axis | 540°/sec | |
| Min.Pass-line | 856mm | |
| Min.Swinging Envelope | 300mm | |
| Repeatability | Z-axis | ±0.05mm |
| W-axis | ±0.03° | |
| Arm(Lower) | ±0.05mm | |
| Arm(Upper) | ±0.05mm | |
| Flip-axis | ±0.06° | |
| Clean Class | Class1(0.1μm/cf) | |
| Payload | 1.5kg | |
| Weight | 90kg | |
| Foot Print | 280mm×342mm | |
| Power Supply | 1phase 200V 4.1A | |
