Wafer Transfer Robot
Atmospheric Type Robot AR-Wn180CL
AR-Wn180CL
Features
- Airtight ferromagnetic fluid seals realize total particle-free condition.
- The realization of top-class industry 500 wafers per hour transfer.
- The industry’s first , due to the use of the special ABS encoder need no change the battery.
- Thorough lightweight and space efficiency.
- Processing speed is 8 times up.(conventional ratio at Hirata)
Specification
| Item | Atmospheric Type Robot | ||||
|---|---|---|---|---|---|
| Type | AR-Wn 180CL-3- S-330 | AR-Wn 180CL-4- T-330 | AR-Wn 180CL-4- SR-330 | AR-Wn 180CL-5- SWW-330 | |
| Arm Type | Single Arm | Twin Arm | Single
Arm with Flip-axis | Single Arm with Double Wrist | |
| Operational Area | Z-axis | 330mm | 330mm | 330mm | 330mm |
| W-axis | 340° | 340° | 340° | 340° | |
| Arm(Lower) | 696mm(Max) | 696mm(Max) | 696mm(Max) | 696mm(Max) | |
| Arm(Upper) | - | 696mm(Max) | - | - | |
| Flip-axis | - | - | 190° | - | |
| Wrist(Lower) | - | - | - | ±120° | |
| Wrist(Upper) | - | - | - | ±120° | |
| Axis Speed | Z-axis | 500mm/sec | 500mm/sec | 500mm/sec | 500mm/sec |
| W-axis | 360°/sec | 360°/sec | 360°/sec | 360°/sec | |
| Arm(Lower) | 1300mm/sec | 1300mm/sec | 1300mm/sec | 1300mm/sec | |
| Arm(Upper) | - | 1300mm/sec | - | - | |
| Flip-axis | - | - | 540°/sec | - | |
| Wrist(Lower) | - | - | - | 360°/sec | |
| Wrist(Upper) | - | - | - | 360°/sec | |
| Min.Pass-line | 636.1mm | 692.5mm | 734.1mm | 727mm | |
| Min.Swinging Envelope | 235mm | 292.5mm | 300mm | 287.5mm | |
| Repeatability | Z-axis | ±0.05mm | ±0.05mm | ±0.05mm | ±0.05mm |
| W-axis | ±0.03° | ±0.03° | ±0.03° | ±0.03° | |
| Arm(Lower) | ±0.05mm | ±0.05mm | ±0.05mm | ±0.05mm | |
| Arm(Upper) | - | ±0.05mm | - | - | |
| Flip-axis | - | - | ±0.05° | - | |
| Wrist(Lower) | - | - | - | ±0.05° | |
| Wrist(Upper) | - | - | - | ±0.05° | |
| Clean Class | Class1(0.1μm/cf) | ||||
| Payload | 1.5kg | ||||
| Weight | 35kg | 42kg | 40kg | 42kg | |
| Foot Print | φ250mm | ||||
| Power Supply | 1phase 200V 3.4A | 1phase 200V 3.6A | 1phase 200V 3.7A | 1phase 200V 4.1A | |
