Wafer Transfer System
　Equipment Front End Module
Features
- Hirata developed high clean performance for most appropriate air current control of FFU, utilizing the in-house component which has proven clean level.
- The Robot, the FOUP opener and the Aligner are all in-house products. Making possible to be flexible layout and offer total wafer transfer systems, meeting demands of various equipments.
- Hirata developed 640 wafers per hour transfer by usage of the transfer robot which has top-class industry high throughput and unique control method.
- Enables handing more than 1515st.
