Glass Substrate Transfer Robot (CR-J120TCL)
Features
- Flexible layout
- Covers several devices with a single loader through the addition of rack type traveling shaft
- High rigidity telescopic type Z-axis stroke: 750 mm, SEMI certified cassette path line maintained at 1000 mm
- Dual-stage independent fork unit optimum device positioning with respect to device - Highly functional design at low cost
- Allows alignment above the hand. Aligns while traveling to allow shorter cycle times.
- All shafts are AC servo driven. Home reset is not necessary through absolute encoder specifications
- Fully manufactured internally for shorter delivery times. - Single controller unit model
- Mounts what was once separately placed controller on the robot main to reduce space requirement to a large extent.
- Improved reliability by simplifying wiring to the utmost
Specification
- Maximum possible transportable size : 1100 x 1300mm
- High speed glass replacement duration : 8 sec
