Auto-loader System HLD Series
Features
- Space savings
- Reduction of pitch between ports due to inner-cassette positioning system
- All accessories are mounted inside the housing
- Space savings and high-speed processing thanks to cross-type substrate conveyance robot - High Speed Operation
- Shortened transport time through the use of high speed transport robot
- Hardness of the robot hands needed to resist high speed transport is maintained through the use of carbon fiber on the robot hands - Low dust
- A non-contact aligner is used on the robot hand enabling the removal of misaligned substrates in the cassette without touching the cassette
- Use of planar floating at cassette positioning - Large substrate compatible
- A line-up that includes up to G6 size - Safety
- Every type of interlock function was incorporated to ensure the safety of the operator and the machinery
Specification
| Model | HLD3000 | HLD4000 | HLD5000 | HLD6000 | |
|---|---|---|---|---|---|
| Substrate size | 550 x 670mm | 730 x 920mm | 1200 x 1300mm | 1500 x 1850mm | |
| Cassette bus line | 900mm | 1000mm | 11000mm | 11000mm | |
| Substrate feed accuracy | ±0.5mm(with using contact alignment) | ||||
| Clean level | Class100 (0.3µm) | ||||
| Hand material | CFRP(carbon fiber) | ||||
| Exterior dimensions 4-ports | Width | 2200mm | 2700mm | 3600mm | 5500mm |
| Length | 4050mm | 5000mm | 6600mm | 9200mm | |
| Height | 1800mm | 2200mm | 2200mm | 3500mm | |
| Functions | Robot | AR-K220 | AR-K520 | AR-J120 | AR-J620 |
| With suction system, substrate sensor, suction confirmation sensor | |||||
| Substrate alignment function (contact type, non-contact type) | |||||
| Cassette port | Floating function, centering system using air cylinder | ||||
| Cassette detection, cassette orientation sensor | |||||
| Mapping | Batch sensing at the cassette port or by the robot | ||||
