Stack Heater HSH Series
Features
- Reduced space
- The facility surface area is half that of a hot plate model - Improved cleanliness level
- Improved cleanliness resulting from the absence of moving parts
- Elimination of adhered sublimated substances through the use of collecting traps - Low cost
- Reduced cost realized from simple design - Reduction of irregular pins
- Reduction of irregular pins though heating of both sides - High precision
- High precision temperature profile realized through air flow control
Specification
| Model | HSH3000 | HSH4000 | HSH5000 | HSH6000 | HSH7000 | |
|---|---|---|---|---|---|---|
| Maximum substrate size | 550 x 670mm | 730 x 920mm | 1200 x 1300mm | 1500 x 1850mm | 1850 x 2100mm | |
| Number of batches that could be mounted | 6 | 6 | 6 | 6 | 6 | |
| Temperature setting | 50~200°C | |||||
| Temperature accuracy* | Range：4°C | |||||
| Dimension | Width | 1250mm | 1480mm | 1900mm | 2400mm | 2700mm |
| Length | 1250mm | 1480mm | 2000mm | 2200mm | 2500mm | |
| Height | 2100mm | 2200mm | 2700mm | 3000mm | 3000mm | |
| Weight | 2500kg | 3000kg | 3600kg | 5000kg | 7000kg | |
＊Values may differ depending on the temperature setting conditions.
Basic principle of reduced pressure drying
