FPD(Flat Panel Display) related equipment

Pressure Difference Drier HVD Series

Features
  • Shortened drying time
    - Reduces hot plate process duration by half
  • Negligible irregularity through low temperature drying - Reduces burn irregularities to the minimum possible through drying by pressure difference
    - Eliminates pin trace irregularity through drying by pressure difference
  • Supports large substrates
    - Dries substrates up G8 size
Specification
ModelHVD3000HVD4000HVD5000HVD6000HVD8000
Maximum substrate size550 x
670mm
730 x
920mm
1200 x
1300mm
1500 x
1850mm
2200 x
2500mm
Internal chamber capacity (L)25457595200
Exhaust air capacity
(L/ Min)
200010000300006000060000
Pressure and time to attainment of vacuum13Pa/15Sec
DimensionsWidth1450mm1500mm2100mm2700mm3000mm
Length1250mm1500mm1900mm2200mm3200mm
Height2000mm2200mm2500mm2700mm3000mm
Weight1000kg2000kg3000kg5000kg9500kg

*Values vary depending on application conditions.

Contents