| Cassette Port (LCC) |
| Supports AGV/MGV |
| Cassette positioner | Guide type / centering type |
| Substrate mapping | Up to 100% detection (option) |
| Head Coater (H / C) |
| Maximum coating viscosity | 3~15000cps(differs with coating conditions) |
| Coating film thickness | 1~200µm |
| Coating precision | ±2%(differs with coating conditions) |
| Reduced Pressure Drying (V / D) |
| Vacuum attainable | 13.3 Pa-abs(0.1Torr) |
| Heater | far infra-red ray plate |
| Robot (RPW) |
| Robot model | Our company made robot 6 axis |
| Soft bake (S / B) |
| 1)Hot plate (H / P) |
| Range of setting temperature | normal temperature ~200°C (maximum setting 200°C) |
| Temperature precision | ±3°C(at 170°C) |
| Gap between plate and substrate | Proximity Pin |
| 2)Cool plate (C / P) |
| Range of setting temperature | 22°C~25°C |
| Temperature precision | Temperature setting±1°C |