High Accuracy Applicator (Head Coater) HC Series
Features
- Space savings
- Resist fluid, cleaning fluid, etc. - Energy savings
- Minimal power consumption - Closed dispensing system offering lower particle generation and coating material deterioration.
- Framed application possible
- Edge and rear surface cleaning after application unnecessary - Large or thin and elongated substrates compatible
- High viscosity liquid application possible
- Minimal substrate cracking possibility
- High safety
Specification
| Model | HC3000 | HC4000 | HC5000 | HC6000 | HC7000 | HC8000 | |
|---|---|---|---|---|---|---|---|
| Maximum substrate size | 550 x 670mm | 730 x 920mm | 1200 x 1300mm | 1500 x 1850mm | 1850 x 2100mm | 2200 x 2500mm | |
| Maximum application viscosity* | 1~15000cps | ||||||
| Application accuracy | 1~200µm | ||||||
| Device dimensions* | ±2％ | ||||||
| Device dimensions | Width | 1720mm | 1900mm | 2640mm | 2940mm | 3290mm | 4050mm |
| Length | 2000mm | 2270mm | 3100mm | 3650mm | 3900mm | 4265mm | |
| Height | 2200mm | 2200mm | 2200mm | 2500mm | 2500mm | 2720mm | |
| Substrate bus line | 1300mm | 1300mm | 1500mm | 1500mm | 1500mm | 1650mm | |
| Weight | 4000kg | 5000kg | 7000kg | 10000kg | 15000kg | 20000kg | |
＊Values vary depending on application conditions.
Film thickness accuracy
Film thickness accuracy at sequence application
