Semiconductor related equipment

The Implementation of Cleanliness, High throughput, Ease of maintenance

At semiconductor related production equipment, we manufacture and market the Load Port which transfer silicon wafer to each processing equipment, wafer transfer robots(Atmospheric type and vacuum type),and EFEM which integrated the Load Port and wafer transfer robots.



Semiconductor related Equipment (1'12）

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Wafer Transfer System

efem

EFEM(Equipment Front End Module）
Equipment transfer-ing wafers between the FOUP openers on the Load Port with high speed and cleanliness.

 ウェーハソータ

Wafer Sorter

Equipment transfer-ing wafers in EFEM with high speed and cleanliness.

Wafer Transfer Robot

ar-wn180cl

Atmospheric type
AR-Wn series
AR-Wn180CL
Transfer robots achieving high speed transportation meeting lightweight and space efficiency.

 ar-wn180cl-5-tr-940

Atmospheric type AR-Wn series AR-Wn180CL-5-TR-940 Transfer robots with enlarged Z stroke accomodating multi-stage chamber type equipments.
 

Vacuum type
AR-WV series
Transfer robots accepting from low-vacuum environment to high-vacuum environment.

Load Port

foup opener

FOUP Opener
KWF series

Opener only for FOUP accepting 300mm wafer.

 kwo

SMIF Pod Opener
with arm
KWO series
SMIF Pod Opener loaded arm with tilt feature.

 
kwy

SMIF Pod Opener
（Manual operation）
KWY series

Manual opening and closing control SMIF Pod Opener.

 kwp

SMIF Pod Opener
( Automated operation)
KWP series
Automatic opening and closing control SMIF Pod Opener.

Wafer Positioning

prealigner

Prealigner
KWA series
Wafer positioning device providing high quality alignment using non-contact(sensor-based)approach.

 edge grip prealigner

Edge Grip Prealigner
Wafer positioning device providing high quality alignment using Edge grip.

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