2003

December 2003

SEMICON Japan 2003 Exhibit

HIRATA place its wafer transport robot, EFEM and other products on exhibit at the SEMICON Japan 2003 Exhibit held at the Makuhari Messe international convention center in Chiba, Japan from December 3 to 5, 2003.

July 2003

Flat Panel Display Technological Exhibit (known as FINETECK Japan 2003)

HIRATA participated in the Flat Panel Display Technological Exhibit (called FINE TECK Japan 2004) that was held from July 2 to 4 at TOKYO BIG SIGHT and placed the following products on display:

• Large scale glass substrate transport robot in support of the 6th and 7th generation large scale glass substrates
• High precision resist coating device, head coater
• Power saving baking (drying) oven, stock heater

July 2003

SEMICON West 2003 Exhibit

HIRATA participated at the SEMICON West 2003 trade exhibit held on 14th - 16th of July in San Francisco/United States, the largest exhibit of its kind in the world.