2002

December 2002

Semicon Japan 2002 Exhibits

The following robots were placed on exhibit at the SEMICON Japan 2002 held at the Makuhari Messe International Exhibit Hall in Chiba from December 4 to December 6.

• 300 mm wafer transport twin arm robot, the most compact all AC servo in industry
• Vacuum chamber and 300 mm wafer transport vacuum robot that makes use of in-house, high-speed, highly accurate processing machines
• Completely separate drive, particle-less and operator friendly SMIF Pod opener
• Completely electrically driven FOUP opener that has received the highest marks in the industry