02 Semiconductor related equipment

In the field of semiconductor-related production equipment, we manufacture and market the Load Port which transfers silicon wafers to individual processing equipment, wafer transfer robots(Atmospheric type and vacuum type), and EFEM which integrate the Load Port and wafer transfer robots.

Related products:Intelligent power modules

Equipment Front End Module / Sorter

Hirata Equipment Front End Module is located in front of the process equipment that processes wafers. The Equipment Front End Module passes wafers between the FOUP (pods) and the process equipment and the sorter transfers wafers in a clean environment.

450 mm Equipment Front End Module/Sorter series

300 mm Equipment Front End Module/Sorter series

Wafer transfer robot

Wafer transfer robots that can be used in low-vacuum environments and high-vacuum environments.

450mm

Wafer transfer robots that can be used in low-vacuum environments and high-vacuum environments.

300mm

Aligner

Aligners are wafer positioning equipment.

Prealigner

Edge grip prealigner

Load port

Load ports that support 450 mm and 300 mm wafers.

FOUP opener

SMIF opener

SMIF pod opener that support 200 mm wafers.

200 mm SMIF pod opener

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