Gantry Robot(GR-1750）
Cartesian coordinate robots allow high-speed, extremely durable, and practically maintenance-free, and improve customer’s automated factories with this freely moving, multi-tasking, highly integrative robot.

Atmospheric type
AR-Wn series
AR-Wn180CL
Transfer robots achieving high speed transportation meeting lightweight and space efficiency.

Atmospheric type
AR-Wn series AR-Wn180CL-5-TR-940 Transfer robots with enlarged Z stroke accomodating multi-stage chamber type equipments.

Vacuum type
AR-WV series
Transfer robots accepting from low-vacuum environment to high-vacuum environment.

FOUP Opener
KWF series

Opener only for FOUP accepting 300mm wafer.

SMIF Pod Opener
with arm
KWO series
SMIF Pod Opener loaded arm with tilt feature.

SMIF Pod Opener
（Manual operation）
KWY series

Manual opening and closing control SMIF Pod Opener.

SMIF Pod Opener
( Automated operation)
KWP series
Automatic opening and closing control SMIF Pod Opener.

Prealigner
KWA series
Wafer positioning device providing high quality alignment using non-contact(sensor-based)approach.

Edge Grip Prealigner
Wafer positioning device providing high quality alignment using Edge grip.

Glass Substrate Transfer Robot
CR-J120TCL

Transfer robots transferring glass substrates with high-speed and safety.

6th Generation
Glass Substrate Transfer Robot
CR-J620CL
Flexing-extending type of transfer robots transferring glass substrates with high-speed and safety.